e-skin flat ensures ultra-precise positioning without polygon effect

Producing microelectronics and semiconductor components places extreme demands on production machines. Applications such as pick & place, microdicing or laser processing in particular require the highest repeatability, dynamics and thermal stability with minimal particle emission and wear. Here conventional systems with rolling bearing guides and conventional energy chains reach their limits. The polygon effect of conventional energy chains, friction or vibrations significantly impair precision. At the same time, the industry requires solutions that can be operated around the clock in cleanrooms of ISO Classes 5 to 3 without the need for frequent maintenance cycles.

JAT wanted to solve these challenges by integrating CFRP lightweight construction, air bearing technology and granite into a multi-axis system as basic design features. However, to achieve positioning accuracy with nanometre precision as well as extreme accelerations and cycle times, the company needed an accurate and cleanroom-compatible energy supply system that completely avoided mechanical influences such as friction or vibration.

JAT opted for the e-skin flat cable supply system, which has been specifically developed for dynamic cleanroom applications. This space-saving energy supply system not only meets cleanroom requirements for ISO Class 5, it can also be adapted to higher standards such as ISO 4 or ISO 3.

Compared with conventional chains, the e-skin flat eliminates mechanical influences such as the polygon effect, friction forces and vibrations that could impair the positioning accuracy of the gantry system. With its modular design, the e-skin flat can be flexibly integrated into the construction without increasing space requirements. The low particle emission and the maintenance-free nature of the system ensure continuous 24/7 operation without restrictions in the cleanroom.

The result is a multi-axis system that achieves accelerations of up to 100m/s² and positions components with a repeatability of ±0.1µm. The combination of lightweight components and a lubrication-free cable guide system increases efficiency not only in the production of microelectronics, it also contributes to sustainability. By replacing aluminium with CFRP and avoiding lubricants, JAT was able to significantly reduce its CO² footprint.

Even in the development phase, the use of a digital twin allowed virtual commissioning, which accelerated system integration. Customers benefit from a powerful and low-maintenance solution that impresses with maximum precision and dynamics - ideal for demanding applications in microelectronics and semiconductor manufacturing.